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GF 工艺ESD注意事项

GF 工艺ESD注意事项

作者: 蜀湘情缘 | 来源:发表于2020-02-19 11:11 被阅读0次

    Metal width from I/O pad to ESD devices should be at least:

    Metal1                     10 um

    Metal2– Metal5     10 um

    MetalTop                 10 um

    Contacts and vias in the ESD current path should be at least:

    Contact                   50

    Via1                          30

    Via2 – Via4            30

    Top Via                    30

    14.6.2     Design Guidelines for NMOS FETs Connected to I/O Pad

    14.6.2.1 Maximum finger gate width is 40 um (recommended 10-25 um). Minimum total finger

    width used in I/O buffer is 400 um.

    14.6.2.2 Minimum drawn gate length for transistors in I/O buffer is 0.40 um for thick oxide

    transistors and 0.24 um for thin oxide transistors. Poly linewidth for each finger in multifinger transistors must be the same.

    14.6.2.3 Recommended

    draincontact to gate spacing (DCGS) for silicide-blocked drain is 2.0 um

    (2.08 um for 1.8V device), where minimum silicided-block to gate edge spacing is 1.78 um

    (1.86 um for 1.8V device). Refer to section 14.6.2.11 for various options of laying out

    salicide block.

    14.6.2.4 Recommended

    sourcecontact to gate spacing (SCGS) with salicide-blocked is 0.70 um

    (0.48 um for 1.8V device), where recommended silicided-block to gate edge spacing is 0.48

    um (0.26 um for 1.8V device). Refer to section 14.6.2.11 for various options of layout out

    salicide block.

    14.6.2.5 Ensure uniform current flow across the entire width of FET. Avoid using fingers with

    different widths. Maximize the number of contacts along entire width based on

    electromigration rule. Non-orthogonal and serpentine poly gates are not allowed in the I/O

    buffer.

    14.6.2.6 Double guard ring structure must be placed around protection circuit to improve latch-up

    immunity. No other active circuitry is allowed inside or between such guard rings.

    14.6.2.7 Minimum Composite overlap of contact for diffusion connected to pad is 1.0 um.

    14.6.2.8 Rounded/Beveled corner is recommended for all diffusions along the ESD discharge path to

    reduce electric field at the corners.

    14.6.2.9 Minimum spacing of 15 um must be added between I/O pad NCOMP to nearby Ground

    NCOMP or from a Vdd NCOMP to Ground NCOMP.

    14.6.2.10 For multi-finger FETs in the ESD path, layout must be done to make sure that each finger

    sees identical resistance in the ESD current path. This requires identical layout of fingers

    (width and poly lengths) and current must enter from one side and leave from the other side

    in the array of fingers.

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